惯性传感器

First Sensor拥有高度创新的高精度惯性传感器制造用技术平台，广泛适用于地球工程、状态监测或导航应用等领域。MEMS系列传感器可根据客户的个性化应用需求灵活定制。

倾角计与加速度计

电容式倾角计与加速度计采用单晶硅传感器元件，融合最先进的微机械加工技术，实现高性噪比和优异的温度稳定性，因此能够检测极其微小的倾角或加速度变化。

得益于高宽比微结构（HARMS），该系列传感器具有极低的交叉轴灵敏度。此外，已获专利的高度灵活型AIM（气隙绝缘微结构）技术可最大限度地减少寄生电容。

Inertial sensor

First Sensor has a highly innovative high-precision inertial sensor manufacturing technology platform that is widely used in geoengineering, condition monitoring or navigation applications. MEMS series sensors can be flexibly customized to meet the needs of customers' individual applications.

Inclinometer and accelerometer

Capacitive inclinometers and accelerometers use monocrystalline silicon sensor components that incorporate state-of-the-art micromachining technology to achieve high noise-to-noise ratios and excellent temperature stability, enabling extremely small dip or acceleration changes to be detected.

Thanks to the high aspect ratio microstructure (HARMS), this series of sensors has extremely low cross-axis sensitivity. In addition, the patented, highly flexible AIM (air gap insulating microstructure) technology minimizes parasitic capacitance.

PDF datasheet: SI/SA inertial sensors.pdf

PDF datasheet: SI/SA evaluation kits for inertial sensors.pdf